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The pulsed vacuum arc ion plating technology is used to plate the diamond-like carbon film, which has the advantages of stable film performance, no absorption peak at 3.4 μm, and simple method. This new technology has its own intellectual property rights. At present, we have successfully plated diamond-like infrared anti-reflection coatings and protective films on silicon and germanium substrates, and also coated tool coatings for domestic enterprises, which were measured in the range of 3 to 5 μm and 8 to 12 The transmittance is over 95%, the film adhesion is good, wear resistance, high temperature resistance, chemical corrosion resistance. We can now plate diamond-like films, titanium nitride, titanium carbide, molybdenum , tungsten, tantalum and other films. These films are widely used in infrared optics, cutting tools, head protection, chip protection, surface modification, lubrication, decoration, etc. application.
Introduction: As a new type of thin film material, diamond- like carbon film has excellent infrared optics, mechanics, electrical, acoustic, thermal and other properties, and has a wide range of applications. With the development of high-tech such as aerospace, infrared technology, laser, fiber optic communication, etc., higher requirements are imposed on infrared optical materials. And germanium, silicon, zinc sulfide, zinc selenide optical materials currently used, can not meet the requirements, great importance is now internationally diamond-like thin film technology. As a new generation of optical materials, diamond-like carbon film has a series of excellent properties: transparent infrared region, high hardness, abrasion resistance, stable chemical properties, thermal shock resistance, small thermal expansion coefficient, etc., which can meet the growing military and civilian optics. The needs of the instrument. The use of diamond-like carbon films as window protective films and infrared antireflection films and protective films for infrared optical systems has a very broad application prospect.